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Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation
本文書の目的は，半導体産業で使用されるトリメチルホスフィンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。
This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25
SEMI D46-1019 (technical revision)
C05700 - SEMI C57 - Specification for Argon StdTpc-Process Chemicals - Solvents Alternative methods may be usedThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in March 2017; originally published March 2005; previously published February 2011. The purpose of this Document is to provide a series of specifications for different grades of argon (Ar) that are used in the
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